The content of Si, Mn, V, Cu and other impurity elements in tool steel samples was analyzed by wavelength dispersive X-ray fluorescence spectrometry (XRF). Using Ag target X-ray tube and the SDD detector (FWHM < 135 eV@5.9 keV). The best working conditions of the instrument are tested before measurement, including tube pressure, flow, filter used and measuring time. The repeatability of the instrument is verified to meet the standard. Finally, the detection limit of the instrument is tested. In the analysis and comparison, linear regression method is used to eliminate the matrix effect among the elements in the sample, and it is found that the multiple linear regression method has a good correction effect on the matrix effect. The results show that the average relative errors of Si, Mn, V and Cu are 3.24%, 3.05%, 0.29% and 0.59% respectively by using the optimal linear regression analysis. The method improves the control requirements of impurity elements in iron base alloy.
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